KS C IEC 62047-8-2015(2020) Semiconductor devices ― Micro-electromechanical devices ― Part 8: Strip bending test method for tensile property measurement of thin films
2015KS C IEC 62047-8:2015 Semiconductor devices ― Micro-electromechanical devices ― Part 8: Strip bending test method for tensile property measurement of thin films