BS IEC 62047-44:2024
Semiconductor devices. Micro-electromechanical devices - Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Standard No.
BS IEC 62047-44:2024
Release Date
2024
Published By
British Standards Institution (BSI)
Latest
BS IEC 62047-44:2024
 
Introduction
This standard specifies the dynamic performance testing methods for microelectromechanical systems (MEMS) resonant electric field sensitive devices used in semiconductor components. It provides guidelines and procedures for assessing the operational characteristics of these MEMS devices under varying conditions, ensuring consistent evaluation criteria across different applications.

BS IEC 62047-44:2024 history

  • 2024 BS IEC 62047-44:2024 Semiconductor devices. Micro-electromechanical devices - Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Standard and Specification

IEC 62047-44:2024 Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices DIN EN 62047-1 E:2014-05 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions DIN EN 62047-28 E:2015-09 Semiconductor devices - Microelectromechanical devices - Part 28: Functional test methods for vibration-driven MEMS electric actuator energy harvesting devices BS IEC 62047-45:2025 Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures DIN EN 62047-26 E:2014-05 Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures BS IEC 62047-48:2024 Semiconductor devices. Micro-electromechanical devices-Test method for determining solution concentration by optical absorption using MEMS fluidic device BS IEC 62047-43:2024 Semiconductor devices. Micro-electromechanical devices - Test method of electrical characteristics after cyclic bending deformation for flexible micro IEC 62047-48:2024 Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices - Test methods for MEMS piezoresistive pressure-sensitive device on wafer


Copyright ©2025 All Rights Reserved